Semiconductor device and method of producing the same

ABSTRACT

To provide a semiconductor device including a functional laminate having flatness and crystallinity improved by effectively passing on the crystallinity and flatness improved in a buffer to the functional laminate, and to provide a method of producing the semiconductor device; in the semiconductor device including the buffer and the functional laminate having a plurality of nitride semiconductor layers, the functional laminate includes a first n-type or i-type Al x Ga 1-x N layer (0≦x&lt;1) on the buffer side, and an Al z Ga 1-z N adjustment layer containing p-type impurity, which has an approximately equal Al composition to the first Al x Ga 1-x N layer (x−0.05≦z≦x+0.05, 0≦z&lt;1) is provided between the buffer and the functional laminate.

TECHNICAL FIELD

The present invention relates to a semiconductor device and a method of producing the semiconductor device. The present invention particularly relates to a semiconductor device such as ultraviolet light emitting diodes, electronic devices, and to a method of producing the same.

RELATED ART

In recent years, ultraviolet LEDs (light emitting diodes) that can be favorably used in the fields of sterilization, water purification, medical treatment, illumination, high-density optical recording, and the like and high electron mobility transistors (HEMTs) which have a device structure formed using an AlGaN based thin film as a material are known. Further, for such ultraviolet LEDs and HEMTs having a device structure formed using an AlGaN-based thin film, various approaches have been made to obtain high quality AlGaN-based thin films.

In general, an ultraviolet LED has a functional laminate having a structure in which a light emitting layer is interposed between an n-type nitride semiconductor layer and a p-type nitride semiconductor layer. In order to relax strain due to difference in lattice constant between the nitride semiconductor layers and a substrate, a functional laminate is generally formed on the substrate with a buffer interposed therebetween. HEMTs have a functional laminate including an i-type channel layer and an n-type electron supply layer that are formed of nitride semiconductor layers. In order to reduce strain due to difference in lattice constant between the nitride semiconductor layers and the substrate, the functional laminate is also generally formed over the substrate with a buffer interposed therebetween.

Patent Document 1 discloses a nitride semiconductor substrate in which a first semiconductor layer (buffer) mainly containing AlN or AlGaN that is doped with a lateral growth promoting substance is formed on a substrate directly or with one or a plurality of nitride semiconductor layers mainly containing AlN or AlGaN interposed therebetween, and a functional laminate including a nitride semiconductor layer is formed thereon. According to this technique, lateral growth is promoted in the buffer, accompanied by promotion of coupling of dislocations, which allows the threading dislocation in a buffer surface to be reduced.

PRIOR ART DOCUMENT Patent Document

-   Patent Document 1: Japanese Patent Application Publication No.     JP2005-235908

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention

In Patent Document 1, a typical AlN low-temperature deposited buffer layer is formed between a buffer and an n-type A_(0.4)Ga_(0.6)N layer. However, the relation of the Al compositions between the AlN low-temperature deposited buffer layer and the n-type Al_(0.4)Ga_(0.6)N layer is not considered. Further, the AlN low-temperature deposited buffer layer reduces the effect of promoting lattice relaxation in the buffer provided thereunder; thus, crystallinity improvement due to lateral growth was not sufficient.

In addition, in a case where, on a buffer, a nitride semiconductor layer having a different composition from the buffer is formed as a functional laminate, problems of lattice mismatch between the nitride semiconductor layer of the functional laminate and the buffer has not been noted.

An object of the invention is to solve the above problems and provide a semiconductor device in which the crystal quality improved in a buffer is effectively passed on to a functional laminate to improve flatness and crystallinity of the functional laminate. Another object of the invention is to provide a method of producing the semiconductor device.

Means for Solving the Problem

The inventors of the present invention have made various studies to achieve the above objects to consequently find that the crystallinity and flatness improved in a buffer can be effectively passed on to a functional laminate by providing an Al_(z)Ga_(1-z)N adjustment layer between the buffer on a substrate and an n-type Al_(x)Ga_(1-x)N layer in a functional laminate having, for example, the n-type Al_(x)Ga_(1-x)N layer (0≦x<1), a light emitting layer, and a p-type Al_(y)Ga_(1-y)N layer (0≦y≦1) from the buffer side. Note that the Al_(z)Ga_(1-z)N adjustment layer (0≦z<1) is containing p-type impurity, and the Al composition z is within the range of ±0.05 from the Al composition x of the n-type Al_(x)Ga_(1-x)N layer in the functional laminate closest on the buffer side. Thus, they accomplished the present invention.

The present invention is based on the above findings, and its constituent features are as follows.

(1) A semiconductor device comprising a buffer and a functional laminate including a plurality of nitride semiconductor layers, on a substrate,

wherein the functional laminate includes a first n-type or i-type Al_(x)Ga_(1-x)N layer (0≦x<1) on the buffer side, and

an Al_(z)Ga_(1-z)N adjustment layer containing p-type impurity, which has an approximately equal Al composition to the first Al_(x)Ga_(1-x)N layer (x−0.05≦z≦x++0.05, 0≦z<1) is provided between the buffer and the functional laminate.

(2) The semiconductor device according to (1) above, wherein the substrate is an AlN template substrate.

(3) The semiconductor device according to (1) or (2), wherein the buffer includes an Al_(α)Ga_(1-α)N layer (0≦α≦1) at least on the functional laminate side, and difference between an Al composition α of the Al_(α)Ga_(1-α)N layer and an Al composition x of the first Al_(x)Ga_(1-x)N layer is 0.1 or more.

(4) The semiconductor device according to any one of (1) to (3) above, wherein

the first Al_(x)Ga_(1-x)N layer is n-type, and

the functional laminate includes at least a light emitting layer and a second Al_(y)Ga_(1-y)N layer (0≦y<1) in this order on the first Al_(x)Ga_(1-x)N layer.

(5) The semiconductor device according to any one of (1) to (4) above, wherein an i-type Al_(w)Ga_(1-w)N layer (x−0.05≦w≦x+0.05, 0≦w≦1) not doped with impurity is further provided between the Al_(z)Ga_(1-z)N adjustment layer containing p-type impurity and the first Al_(x)Ga_(1-x)N layer.

(6) The semiconductor device according to (5) above, wherein the Al_(z)Ga_(1-z)N adjustment layer containing p-type impurity and the i-type Al_(w)Ga_(1-w)N layer not doped with impurity satisfy the relationship of z<w.

(7) The semiconductor device according to any one of (1) to (6) above, wherein a thickness of the Al_(z)Ga_(1-z)N adjustment layer containing p-type impurity is in a range of 100 nm to 1500 nm.

(8) The semiconductor device according to any one of (1) to (7) above, wherein the Al_(z)Ga_(1-z)N adjustment layer containing p-type impurity is doped with Mg, and the Mg concentration is in a range of 5×10¹⁶/cm³ to 2×10²⁰/cm³.

(9) The semiconductor device according to any one of (1) to (8) above, wherein a concentration of O contained in the first Al_(x)Ga_(1-x)N layer is less than 2×10¹⁸/cm³.

(10) The semiconductor device according to any one of (1) to (9) above, wherein the buffer includes a superlattice strain buffer layer having a superlattice structure formed by alternately stacking Al_(β)Ga_(1-β)N layers (0≦β≦0.3) and AlN layers.

(11) A method of producing a semiconductor device, wherein a buffer, an Al_(z)Ga_(1-z)N adjustment layer containing p-type impurity (x−0.05≦z≦x+0.05, 0≦z<1), and a functional laminate including an i-type or n-type Al_(x)Ga_(1-x)N layer (0≦x<1) are sequentially formed on a substrate.

Effect of the Invention

The present invention can provide a semiconductor device having a functional laminate excellent in flatness and crystallinity and a method of producing the semiconductor device. The flatness and crystallinity improved in a buffer can be effectively passed on to the functional laminate by providing an Al_(z)Ga_(1-z)N adjustment layer between the buffer on a substrate and a first n-type or i-type Al_(x)Ga_(1-x)N layer in the functional laminate having an n-type Al_(x)Ga_(1-x)N layer (0≦x<1). The Al_(z)Ga_(1-z)N adjustment layer (0≦z<1) is containing p-type impurity, and the Al composition z is within the range of ±0.05 from the Al composition x of the first Al_(x)Ga_(1-x)N layer.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic cross-sectional view of a semiconductor device 100 in accordance with the present invention.

FIG. 2 is a schematic cross-sectional view showing a layered structure in a production of a semiconductor device 100 according to the present invention.

FIGS. 3( a) and 3(b) are 1000× photomicrographs of surfaces in Experimental Examples 1 and 2, respectively.

BEST MODE FOR CARRYING OUT THE INVENTION

Embodiments of a semiconductor device in accordance with the present invention will be described with reference to the drawings.

FIG. 1 is a schematic cross-sectional view showing an example of the semiconductor device 100 in accordance with the present invention.

The semiconductor device 100 in accordance with the present invention includes a buffer 2 and a functional laminate 3 having a plurality of nitride semiconductor layers on a substrate 1 as shown in FIG. 1. The semiconductor device 100 is characterized in that the functional laminate 3 has a first n-type or i-type A_(x)Ga_(1-x)N layer (0≦x<1) 4 (n-type in FIG. 1) on the buffer 2 side, and an Al_(z)Ga_(1-z)N adjustment layer (x−0.05≦z≦x+0.05, 0≦z<1) 5 (hereinafter also referred to simply as “adjustment layer 5”) is provided between the buffer 2 and the functional laminate 3. The adjustment layer 5 contains p-type impurity, and has an approximately equal Al composition to the first Al_(x)Ga_(1-x)N layer 4. With such a structure, flatness and crystallinity improved in the buffer 2 can be effectively passed on to the functional laminate 3, which results in preferable flatness and crystallinity of the functional laminate 3. Note that the functional laminate 3 refers to a portion serving as a device, in which for example electric current flows, in a semiconductor device such as an LED or an HEMT, and the function of a device is not imparted to the adjustment layer 5 even if the adjustment layer 5 is adjacent to the first Al_(x)Ga_(1-x)N layer (0≦x<1) 4.

The Al_(z)Ga_(1-z)N adjustment layer 5 containing p-type impurity is provided between the buffer 2 and the n-type Al_(x)Ga_(1-x)N layer 4, which can particularly prevent impurities such as oxygen (O) from diffusing into the functional laminate 3 from the substrate 1; as a result, the light output can be improved. Further, since the adjustment layer 5 contains p-type impurity, lateral growth in the adjustment layer 5 is promoted, and the flatness of the adjustment layer 5 can be improved, which consequently improves the flatness of layers thereon. Further, the Al composition z of the Al_(z)Ga_(1-z)N adjustment layer 5 containing p-type impurity is set within the range of ±0.05 from the Al composition x of the n-type Al_(x)Ga_(1-x)N layer 4, so that the crystallinity and flatness improved in the buffer 2 and the p-type Al_(z)Ga_(1-z)N adjustment layer 5 can be effectively passed on to the n-type Al_(x)Ga_(1-x)N layer 4 and even to the layers provided thereon. Thus, the semiconductor device 100 of the present invention can achieve high light output.

Here, the p-type impurity is preferably Mg, Zn, Ca, or Be, more preferably Mg or Zn, and Mg is highly preferred. In terms of the segregation effect for nitride semiconductors, Mg, Zn, Ca, or Be can be used as the p-type impurity. Mg or Zn is preferred as a lateral crystal growth promoting substance for promoting the crystal growth of AlGaN or GaN in the lateral direction. Among them, Mg hardly diffuses into other layers, which makes it highly preferable as a lateral crystal growth promoting substance. Further, the Al_(z)Ga_(1-z)N adjustment layer containing p-type impurity may be not only a p-type Al_(z)Ga_(1-z)N adjustment layer obtained by activation of p-type impurity but alternatively an Al_(z)Ga_(1-z)N adjustment layer doped with p-type impurity not subjected to an activation process.

It is preferable that the first Al_(x)Ga_(1-x)N layer 4 is n-type, and the functional laminate 3 has at least a light emitting layer 6 and a second p-type Al_(y)Ga_(1-y)N layer (0≦y<1) 7 in this order on the first Al_(x)Ga_(1-x)N layer 4. With the thus formed light emitting device, the flatness and crystallinity improved in the buffer 2 can be effectively passed on to the functional laminate 3, in particular to the light emitting layer 6 in the functional laminate 3; thus, the functional laminate 3 can have preferable flatness and crystallinity, and light output can be improved.

Further, an i-type Al_(w)Ga_(1-w)N layer (0≦w<1) 8 not doped with impurity (hereinafter also referred to as “undoped” Al_(w)Ga_(1-w)N layer 8) having an approximately equal Al composition to the first Al_(x)Ga_(1-x)N layer 4 is preferably provided in addition between the adjustment layer 5 and the first Al_(x)Ga_(1-x)N layer 4. Moreover, the Al composition w of this undoped Al_(w)Ga_(1-w)N layer 8 is preferably within the range of ±0.05 from the Al composition x of the first Al_(x)Ga_(1-x)N layer 4. This is for effectively passing on the crystallinity and flatness improved in the adjustment layer 5 to the first Al_(x)Ga_(1-x)N layer 4 and even to layers thereon; further preventing the diffusion of the above impurities; and avoiding thyristor effects due to pn junction in a case where the first Al_(x)Ga_(1-x)N layer 4 is n-type.

More preferably, x−0.05≦z<w≦x+0.05 may be taken. Strain due to lattice constant difference between a layer in the buffer 2 on the closest side to the functional laminate 3 and the first Al_(x)Ga_(1-x)N layer 4 (lattice constant difference between x and a to be described) can be more appropriately reduced due to the relationship between the Al_(z)Ga_(1-z)N adjustment layer 5 containing p-type impurity and the i-type Al_(w)Ga_(1-w)N layer 8. With the relation x−0.05≦z<w≦x+0.05, upper layers have higher Al composition and consequently have a relatively small lattice constant, so that tensile stress is applied by lower layers to the layers stacked thereabove. In other words, tensile stress is applied in the crystal growth of the i-type Al_(w)Ga_(1-w)N layer 8. Therefore, crystal growth of the i-type Al_(w)Ga_(1-w)N layer 8 not doped with p-type impurity itself can additionally have an effect of promoting lateral growth, and the effect of maintaining the improved flatness can be further enhanced by the i-type Al_(w)Ga_(1-w)N layer 8. However, when the composition difference from x is more than 0.05, cracks would occur or flatness would be affected by strain due to the difference in the lattice constant.

The i-type AlGaN layer not doped with impurity here refers to a layer which is not designed to be doped with specific impurity (also referred to as “undoped layer”). Ideally, a semiconductor preferably contains no impurity; however, a semiconductor with low carrier density (for example, less than 5×10¹⁶/cm³) can be referred to as i-type as long as it does not electrically serve as a p-type or n-type semiconductor.

The thickness of the adjustment layer 5 is preferably in the range of 100 nm to 1500 nm, more preferably 100 nm to 300 nm. When the thickness is less than 100 nm, sufficient surface flatness would not be achieved; when the thickness is more than 1500 nm, cracks would occur in the surface of the adjustment layer; and when the thickness is more than 300 nm, cracks would occur in the functional laminate.

The adjustment layer 5 is doped with magnesium (Mg), and its Mg concentration is preferably in the range of 5×10¹⁶/cm³ to 2×10²⁰/cm³. When Mg is used as p-type impurity, the lateral growth of the adjustment layer 5 is promoted to help promotion of planarization. When the Mg concentration is less than 5×10¹⁶/cm³, sufficient surface flatness would not be achieved. Further, when the Mg concentration is more than 2×10²⁰/cm³, the Mg concentration is supersaturated to cause segregation, which would significantly impair the flatness of the surface.

The concentration of oxygen (O) contained in the first Al_(x)Ga_(1-x)N layer 4 is preferably less than 2×10¹⁸/cm³, more preferably 1×10¹⁸/cm³ or less. Oxygen contained in the n-type Al_(x)Ga_(1-x)N layer 4 has been mixed in, for example when a layer is stacked on the substrate 1 with oxygen in the atmosphere being attached thereto and the oxygen is diffused into the upper layer. The oxygen causes reduction in the power output of light emitting devices; therefore, the concentration is preferably even lower.

The buffer 2 serves to reduce dislocation or strain resulted from the lattice mismatch or thermal expansion difference between the substrate 1 and the functional laminate 3, and it can be selected from known buffers depending on the type of the substrate 1 and the functional laminate 3. The present invention is advantageous in a case where the Al compositions of layers in the buffer 2 and the functional laminate 3 that are most close to each other are different, and particularly in a case where the difference of the Al compositions is 0.1 or more. Specifically, the difference between the Al composition α of the Al_(α)Ga_(1-α)N layer (0≦α≦1) in the buffer 2 on the closest side to the functional laminate 3 and the Al composition x of the first Al_(x)Ga_(1-x)N layer 4 is preferably 0.1 or more.

The buffer 2 may be a single layer or a multilayer, but a superlattice is preferably used. Further, the buffer 2 more preferably includes a superlattice strain buffer layer having a superlattice structure formed by alternately stacking Al_(β)Ga_(1-β)N layers (0≦β≦0.3) 2 a and AlN layers 2 b. The Al_(β)Ga_(1-β)N layers (0≦β≦0.3) 2 a are preferred to be p-type. This is for reducing lattice mismatch and improving the flatness. Note that the layered structure of the superlattice strain buffer layer is partially omitted in the figure. Although not shown in the figure, an AlN layer having a thickness ranging from 500 nm to 1500 nm epitaxially grown on the substrate 1 using a known technique such as MOCVD, MOVPE, HVPE, or MBE, for example, may be provided as an initial layer between the substrate 1 and the superlattice strain buffer layer.

For the thickness of the layers forming the superlattice strain buffer layer, the thickness of the p-type Al_(β)Ga_(1-β)N layers 2 a may be for example, 0.1 nm to 3 nm, preferably 2 nm or less, while the thickness of the AlN layers 2 b may be for example, 0.1 nm to 9 nm, preferably 0.9 nm to 9 nm. Further, as to the number of the stacked p-type Al_(β)Ga_(1-β)N layers 2 a and AlN layers 2 b, the number of the pairs of the p-type Al_(β)Ga_(1-β)N layers 2 a and AlN layers 2 b can be, for example 20 to 70, preferably 20 to 50. Such a number of stacked layers can sufficiently suppress the occurrence of dislocation. Assuming that the superlattice strain buffer layer is AlGaN, the Al composition is generally calculated from the Al composition and the thickness of each layer. It should be noted that the Al composition of the surfaces of the buffer 2 facing to the functional laminate 3 does not refer to the calculated Al composition of the superlattice, but to the practical Al composition of the surfaces irrespective of the thickness.

Note that in the superlattice strain buffer layer, the AlN layers 2 b made of AlN are thicker (the ratio of the AlN layers 2 b is higher) on the substrate 1 side, and the ratio of the AlN layers 2 b with respect to the p-type Al_(β)Ga_(1-β)N layers 2 a preferably decreases gradually to the side of the n-type Al_(x)Ga_(1-x)N layer 4. With such a structure, the crystallinity of the n-type Al_(x)Ga_(1-x)N layer 4 can be further improved.

Further, the superlattice strain buffer layer is not substantially electrically conductive as a whole (for example, the specific resistance measured by a sheet resistance measuring apparatus is 10 Ω·cm/square or more), and the impurity concentration of the whole superlattice strain buffer layer measured by SIMS is preferably 1×10¹⁸ cm⁻³ or less, more preferably 7×10¹⁷ cm⁻³ or less. When the impurity concentration is more than 1×10¹⁸ cm⁻³, thyristor failure would occur in the nitride semiconductor device.

In general, doping of AlN layers with p-type impurity is difficult and involves deterioration of crystallinity; therefore, the AlN layers are designed not to be doped with p-type impurity. In contrast, since the superlattice strain buffer layer of the present invention is not required to be electrically conductive, the amount of impurities in the AlN layers 2 b is preferably much smaller than the normal impurity doping amount, excluding unavoidable impurity diffused from the p-type Al_(β)Ga_(1-β)N layers 2 a.

Here, layers having a low Al content: an Al composition β ranging 0≦β≦0.3, which further contain p-type impurity, can be used as the p-type Al_(β)Ga_(1-β)N layers 2 a. Note that, as the p-type impurity, for example Mg, Zn, Ca, or Be can be used. The p-type impurity can be contained in the Al_(β)Ga_(1-β)N layers 2 a by supplying the p-type impurity simultaneously with a source gas in the formation of the Al_(β)Ga_(1-β)N layers 2 a and alternatively by intermittently supplying the p-type impurity onto the AlN layers 2 b, then forming the Al_(β)Ga_(1-β)N layers 2 a, and diffusing the p-type impurity into the Al_(β)Ga_(1-β)N layers 2 a. The concentration of the p-type impurity in the p-type Al_(β)Ga_(1-β)N layers 2 a may be, for example, 5×10¹⁶/cm³ or more and less than 2×10²⁰/cm³, preferably 7×10¹⁷/cm³ to 1.7×10¹⁹/cm³, more preferably 7×10¹⁸/cm³ to 1.7×10¹⁹/cm³.

In addition, a known substrate that is different kind from Group III nitride on which a Group III nitride can be grown can be used as the substrate 1. An AlN template substrate in which a single crystal AlN layer 1 b is grown directly on a sapphire base substrate 1 a, and an AlGaN template substrate in which a single crystal AlGaN layer 1 b is directly grown on a sapphire base substrate 1 a are preferable. A Si substrate is also preferred.

The inventors found that when an AlN template substrate is used, the above attachment of oxygen (O) in the atmosphere more easily occurs as compared with the case of using a sapphire substrate, and rise in the concentration of oxygen in the functional laminate 3 due to the attached oxygen is required to be suppressed. Then, with respect to a semiconductor device of the present invention, they found that the diffusion of the oxygen (O) into the functional laminate 3 can be effectively suppressed by providing the Al_(z)Ga_(1-z)N adjustment layer 5 containing p-type impurity. The layer containing p-type impurity, which has an adequate thickness is considered to suppress the diffusion of oxygen (O).

Si or the like is preferably used as n-type impurity in the n-type Al_(x)Ga_(1-x)N layer 4. A layer made of Al_(γ)In_(δ)Ga_(1-γ-δ)N (where 0≦γ≦1, 0≦δ≦1, 0≦γ+δ≦1) can be used as the light emitting layer 6. Mg, Zn, Ca, Be, or the like is preferably used as p-type impurity in the p-type Al_(y)Ga_(1-y)N layer 7. The thickness of the layers may be, for example, as follows: the n-type Al_(x)Ga_(1-x)N layer 4: 1300 nm to 1400 nm, the light emitting layer 6: 50 nm to 80 nm, and the p-type Al_(y)Ga_(1-y)N layer 7: 200 nm to 300 nm. Note that these layers can be formed by epitaxial growth using known techniques.

Further, as shown in FIG. 1, a p-side electrode 9 can be provided on the p-type Al_(y)Ga_(1-y)N layer 7, and an n-side electrode 10 can be provided on the partially exposed n-type Al_(x)Ga_(1-x)N layer 4. A NiAu electrode obtained by sequentially vapor-depositing a Ni-containing film and an Au-containing film by vacuum vapor deposition, for example, may be used as the p-side electrode 9. A TiAl electrode obtained by sequentially vapor-depositing a Ti-containing film and an Al-containing film by vacuum vapor deposition, for example, may be used as the n-side electrode 10.

Next, an embodiment of a method of producing a semiconductor device according to the present invention will be described with reference to the drawings.

FIG. 2 schematically shows an example of a layered structure of a semiconductor device 100 in accordance with the present invention at a stage of production.

The method of producing the semiconductor device 100 in accordance with the present invention is characterized by sequentially forming a buffer 2, an Al_(z)Ga_(1-z)N adjustment layer (x−0.05≦z≦x+0.05, 0≦z<1) 5 containing p-type impurity, and a functional laminate 3 containing an i-type or n-type Al_(x)Ga_(1-x)N layer (0≦x<1) 4, on a substrate 1 for example by MOCVD, as shown in FIG. 2. With such a structure, flatness and crystallinity improved in the buffer can be effectively passed on to the functional laminate, so that a semiconductor device having the functional laminate with favorable flatness and crystallinity can be provided.

Next, when the semiconductor device is a light emitting device, as shown in FIG. 1, at least a p-type Al_(y)Ga_(1-y)N layer 7 and a light emitting layer 6 (and part of an n-type Al_(x)Ga_(1-x)N layer 4) which have been formed on the adjustment layer 5 are etched by dry etching to partially expose the n-type Al_(x)Ga_(1-x)N layer 4 on the light emitting layer 6 side (in the upper part of FIG. 1). Then, finally, a p-side electrode 9 and an n-side electrode 10 are formed by vacuum vapor deposition to electrically connect the n-type Al_(x)Ga_(1-x)N layer 4 and the p-type Al_(y)Ga_(1-y)N layer 7. Thus, a semiconductor device 100 shown in FIG. 1 can be obtained.

Since p-type impurity is contained in the adjustment layer 5 of the thus produced semiconductor device 100, lateral crystal growth of the adjustment layer 5 is promoted, so that the flatness and crystallinity of the adjustment layer 5 is improved. Accordingly, the flatness and crystallinity of the n-type Al_(x)Ga_(1-x)N layer 4 formed on the adjustment layer 5 is also improved, which consequently improves the flatness and crystallinity of the light emitting layer 6 and the p-type Al_(y)Ga_(1-y)N layer 7 thereon. Thus, a semiconductor device 100 with high light output can be obtained.

The n-type Al_(x)Ga_(1-x)N layer 4 of a nitride semiconductor device of the present invention may be a laminate of an n-cladding layer and an n-contact layer. Meanwhile, the p-type Al_(y)Ga_(1-y)N layer 7 may be a laminate of a p-cladding layer and a p-contact layer.

The case where the first Al_(x)Ga_(1-x)N layer is n-type has been described above; however, the present invention can also be applied to cases where the first Al_(x)Ga_(1-x)N layer is undoped i-type. When the first Al_(x)Ga_(1-x)N layer is i-type, for example, this i-type Al_(x)Ga_(1-x)N layer is used as a channel layer, and an n-type AlGaN-based layer provided thereon as an electron supply layer, and three electrodes of a source, a gate, and a drain are provided thereon to obtain an electronic device having a HEMT structure.

The above description merely shows examples of embodiments of the present invention, and the present invention is not limited to the embodiments. For example, the above AlGaN layer may be a layer into which In, B, or the like is inevitably mixed at approximately 1% or less.

EXAMPLES

Here, to show the advantage of the adjustment layer 5 in the present invention containing p-type impurity, the fact that significantly favorable flatness can be achieved in a case of forming p-type AlGaN on AlN as compared with a case of forming an n-type or i-type AlGaN layer will be shown experimentally.

Experimental Example 1

A Mg-doped p-type Al_(0.31)Ga_(0.69)N layer (thickness: 1000 nm, doped with Mg, Mg concentration: 1×10¹⁹/cm³) was grown on an AlN template substrate by MOCVD.

Experimental Example 2

A Si-doped n-type Al_(0.31)Ga_(0.69)N layer (thickness: 1000 nm, doped with Si, Si concentration: 4×10¹⁸/cm³) was grown on an AlN template substrate by MOCVD.

Experimental Example 3

An undoped i-type Al_(0.31)Ga_(0.69)N layer (thickness: 1000 nm) was grown on an AlN template substrate by MOCVD.

(Evaluation 1)

Surfaces of the Mg-doped AlGaN layer in Experimental Example 1 above, the n-type AlGaN layer in Experimental Example 2 above, and the i-type AlGaN layer in Experimental Example 3 above were observed using an optical microscope and an atomic force microscope (AFM) to evaluate the flatness of the surfaces using the arithmetic mean roughness Ra obtained by the AFM measurement.

FIGS. 3( a) and 3(b) are micrographs, taken through an optical microscope (1000×), of the surfaces in Experimental Examples 1 and 2, respectively. As evident from the micrographs, no step was seen in Experimental Example 1, while steps were observed in the same field of view in Experimental Example 2. This reveals that Experimental Example 1 in which the Mg-doped Al_(0.31)Ga_(0.69)N layer was grown on the substrate achieved a flatter surface than Experimental Example 2 in which the n-type Al_(0.31)Ga_(0.69)N layer was grown on the substrate. Steps were also found in the surface of Experimental Example 3 similarly to Experimental Example 2.

Further, from the results of the AFM measurements, the arithmetic mean roughness Ra was as follows: Experimental Example 1: Ra=0.74 nm, Experimental Example 2; Ra=6.32 nm, and Experimental Example 3: Ra=5.94 nm. This shows that Experimental Example 1 achieved a significantly flatter surface as compared with Experimental Examples 2 and 3.

The above shows that when the n-type AlGaN layer having a very different Al composition from AlN was formed on AlN, irregularities were formed on the surface of the n-type AlGaN layer. Meanwhile, when the Mg-doped AlGaN layer having a very different Al composition from AlN was formed on AlN, the surface of the Mg-doped AlGaN layer was flat. Note that the flatness of the surface of the undoped i-type AlGaN layer was also impaired to an extent similar to the n-type AlGaN layer in the case where the i-type AlGaN layer was grown directly on AlN.

Example 1

An AlN layer (thickness: 27 nm) was stacked as an initial layer by MOCVD on an AlN template substrate, and then a buffer (superlattice strain buffer layer), a p-type Al_(0.31)Ga_(0.69)N adjustment layer (thickness: 100 nm, Mg concentration: 1×10¹⁸/cm³) doped with Mg as a substance for promoting planarization, an undoped i-type Al_(0.35)Ga_(0.65)N layer (thickness: 300 nm) were epitaxially grown thereon in this order. Further, an n-type Al_(0.35)Ga_(0.65)N layer (thickness: 1300 nm, doped with Si, Si concentration: 1×10¹⁹/cm³), a light emitting layer (multiple quantum well structure with an emission wavelength of 325 nm, total thickness: 64.5 nm), and a p-type Al_(0.32)Ga_(0.68)N layer (thickness: 280 nm, doped with Mg, Mg concentration: 1.5×10¹⁹/cm³) were epitaxially grown in this order to form a functional laminate. Thus, an epitaxial laminate was formed on the substrate. Specifically, in this example, z=0.31, w=x=0.35, and y=0.32 were satisfied and z was within the range of ±0.05 from x; w was equal to x; and z<w.

Note that the superlattice strain buffer layer had a structure in which a superlattice laminate I having 20 pairs of alternately stacked AlN layers (thickness: 9 nm) and GaN layers (thickness: 2.1 nm), a superlattice laminate II having 30 pairs of alternately stacked AlN layers (thickness: 2.7 nm) and GaN layers (thickness: 2.1 nm), and a superlattice laminate III having 50.5 pairs of alternately stacked AlN layers (thickness: 0.9 nm) and GaN layers (thickness: 2.1 nm) (“50.5 pairs” implies that both the first layer and the last layer in the laminate were AlN layers) were sequentially stacked. The GaN layers were doped with Mg.

Here, the layer in the buffer (superlattice strain buffer layer) on the closest side of the functional laminate was an AlN layer. The difference (α−x) between the Al composition α of the buffer on the functional laminate side (the AlN layer) and the Al composition x of the functional laminate on the buffer side (n-type Al_(0.35)Ga_(0.65)N layer), the AlN layer and the n-type Al_(0.35)Ga_(0.65)N layer being opposite to each other, was 1.0-0.35=0.65, and was more than 0.1. Assuming that the superlattice laminate III was AlGaN, the total Al composition η is calculated as 0.9 nm/2.1 nm=0.43. The production conditions of the superlattice strain buffer layer and the p-type Al_(0.31)Ga_(0.69)N layer are shown in Table 1.

TABLE 1 Al Compo- TMG TMA NH₃ Cp₂Mg Device structure sition (sccm) (sccm) (slm) (sccm) Mg-doped Al_(0.31)Ga_(0.69)N 0.31 15 30 10 25 layer Superlattice Superlattice 0 20 — 10 25 strain buffer laminate III 1 — 10 0.5 — layer Superlattice 0 20 — 10 25 laminate II 1 — 10 0.5 — Superlattice 0 20 — 10 25 laminate I 1 — 10 0.5 —

Comparative Example 1

An epitaxial laminate was formed in a manner similar to Example 1 except for that the p-type Al_(0.31)Ga_(0.69)N adjustment layer doped with Mg was not formed.

Example 2

An epitaxial laminate was formed in a manner similar to Example 1 except for that the Al composition of the undoped i-type AlGaN layer was w=0.29 and the Al composition of the n-type AlGaN layer in the functional laminate was x=0.29. Since z=0.31, z is within the range of ±0.05 from x in this example, but z>w.

Example 3

An epitaxial laminate was formed in a manner similar to Example 1 except for that the undoped i-type Al_(0.35)Ga_(0.65)N layer was not formed. In this example, z=0.31 and x=0.35.

Comparative Example 2

An epitaxial laminate was formed in a manner similar to Example 3 except for that the Al composition of the p-type AlGaN adjustment layer was z=0.19. In this comparative example, x=0.35 without change, so that z is out of the range of ±0.05 from x.

Comparative Example 3

An epitaxial laminate was formed in a manner similar to Example 3 except for that the Al composition of the p-type AlGaN adjustment layer was z=0.41. In this comparative example, x=0.35 without change, so that z is out of the range of +0.05 from x.

(Evaluation 2)

Samples of Examples 1-3 and Comparative Examples 1-3 above at a stage where the functional laminate had been formed were analyzed by an X-ray diffractometer to find half widths of the peaks corresponding to the (0002) plane and the (10-12) plane. The results are shown in Table 2. Note that the smaller the half width is, the better the crystallinity is. With respect to the sample of Comparative Example 2, the half width could not have been measured since the surface of the functional laminate was cracked.

TABLE 2 Half width (arcsec) (0002) (10-12) Comparative Example 1 368 683 Example 1 334 528 Example 2 343 542 Example 3 355 619 Comparative Example 2 Cracked Comparative Example 3 366 663

(Evaluation 3)

With respect to the samples of Examples 1-3 and Comparative Examples 1-3 above, the growth surface was scribed with a diamond pen; Indium dots were physically pressed on a point where the n-type AlGaN layer was exposed and a point 1.5 mm apart from this exposed point. Thus, a simple nitride semiconductor device using the formed two points as an n-type electrode and a p-type electrode was manufactured. Then, probes were put on those points; light was output from the rear surface after a DC current of 20 mA was applied; and the light was guided to a multi-channel spectrometer through an optical fiber. The peak intensity of the spectrum was converted to output power to obtain the light output power Po. The emission wavelength was 327 nm in each of the cases. The results are shown in Table 3. Note that the sample of Comparative Example 2 did not emit light.

TABLE 3 Light output (mW) Comparative Example 1 0.2 Example 1 2.1 Example 2 1.7 Example 3 1.1 Comparative Example 2 No light output Comparative Example 3 0.3

(Evaluation 4)

With respect to the samples of Examples 1-3 and Comparative Examples 1-3, the reflectance of the surface after the growth of the AlGaN adjustment layer doped with Mg, during the growth of the i-type AlGaN layer growth, during the growth of the n-type AlGaN layer forming the functional laminate, and during the growth of the light emitting layer was measured, which were normalized with the reflectance of the surface after the growth of the superlattice strain buffer layer.

In order to measure the reflectance of a surface of a wafer being grown, a xenon lamp light source and optical system members which enable irradiation of the wafer through a furnace window were prepared. The wafer was irradiated with the source light, and the reflected light guided through the optical fiber from a light receiving portion was measured by a spectrophotometer. The optical axis was adjusted by using a previously polished sapphire substrate, and the reflection intensity was measured. Relative reflection intensity was determined from the reflectance of the sapphire substrate and the reflectance of the samples at each growth stage. When the sample is grown with its surface being flat, in other words, with the flatness of the surface being high, light passes along the optical axis from the light source to the light receiving portion; therefore, the light intensity of the received light is shown as a constant value. However, when the sample is grown with its surface being rough, light is scattered on the wafer; therefore, the intensity of light to be received becomes lower as compared with the case of flat surface. With this measurement system, the in-situ surface condition of the wafer just being grown can be measured in the form of the light intensity over time, and the change in the surface condition of the wafer during growth can be followed. In this measurement, based on the relative intensity with respect to sapphire which was determined in the growth of the superlattice strain buffer layer, the relative intensity of each growth layer with respect to sapphire was normalized with the relative intensity of the superlattice strain buffer layer. The results are shown in Table 4. The measurement could not be performed on the sample of Comparative Example 2 because of cracks.

TABLE 4 Compar- Compar- Compar- ative ative ative Exam- Exam- Exam- Exam- Exam- Exam- ple 1 ple 1 ple 2 ple 3 ple 2 ple 3 Light 0.58 1.20 1.01 0.79 Un- 0.59 emitting measur- layer able N-type 0.66 0.93 0.86 0.76 0.67 AlGaN layer I-type 0.66 0.93 0.86 AlGaN layer P-type 0.95 0.95 0.95 0.95 AlGaN layer Super- 1.00 1.00 1.00 1.00 1.00 lattice strain buffer layer

As seen in Table 4, in Comparative Examples 1 and 3, the reflectance was not maintained after the growth of the superlattice strain buffer layer, and the reflectance was reduced as upper layers were stacked. Meanwhile, in Examples 1-3, the reflectance was maintained even after the growth of the superlattice strain buffer layer than Comparative Examples 1 and 3. This is considered because the flatness and crystallinity improved in the buffer were effectively passed on to the functional laminate through the p-type Al_(0.31)Ga_(0.69)N adjustment layer.

Note that the intensity of the light emitting layer in Example 1 was 1.2 because the Al composition of the light emitting layer was low and the refractive index thereof was high, which accordingly increased the difference between the refractive indices of the light emitting layer and the ambient gas in the furnace (refractive index of a mixture of N₂ and H₂, which was almost equal to the refractive index of the atmosphere) to increase the reflectance. On the other hand, in Comparative Examples 1 and 3, the reflectance of the light emitting layer was lower than that of the n-type AlGaN layer, which was resulted from the reduction in the reflectance evidently due to surface roughness.

(Evaluation 5)

The impurity concentration of the samples of Example 1 and Comparative Example 1 above was measured by SIMS.

The oxygen (O) concentration of the n-type Al_(0.35)Ga_(0.65)N layer and the light emitting layer in Example 1 was 1×10¹⁸/cm³, while the oxygen (O) concentration of those in Comparative Example 1 was 8×10¹⁸/cm³. The oxygen (O) concentration of the n-type AlGaN layer and the light emitting layer in Examples 2 and 3 was also approximately equal to that in Example 1 and was less than 2×10¹⁸/cm³. Therefore, the p-type AlGaN adjustment layer of the present invention reduced the concentration of oxygen (O) in the layers to be stacked afterwards to less than 2×10¹⁸/cm³, which contributed to the improvement in the light output.

The above results show that with respect to a semiconductor device in accordance with the present invention, the flatness and crystallinity improved in the buffer were passed on to the Al_(0.31)Ga_(0.69)N adjustment layer containing p-type impurity to approximate the Al composition of the adjustment layer to the Al composition of the AlGaN layer thereon. Accordingly, the flatness and crystallinity were passed on to the i-type or n-type Al_(0.35)Ga_(0.65)N, and further to the whole functional laminate. Thus, the light output of the device was demonstrated to be improved. Still further, comparing Example 1 and Example 3, it was found that an i-type Al_(w)Ga_(1-w)N layer not being doped with impurity is preferably provided in addition; meanwhile, comparing Example 1 and Example 2, z<w is more preferable.

It is evident that a high output light emitting device can be obtained by fabricating a semiconductor device by then partially exposing the n-type AlGaN layer forming the functional laminate obtained in this example by dry etching, for example, forming an n-side electrode on the n-type AlGaN layer, and forming a p-side electrode on the p-type AlGaN layer.

In cases where an AlGaN layer is grown directly on AlN as in Experimental Example 2 and Experimental Example 3, the surface flatness is affected. It was found that the surface of the AlGaN layer can be planarized by providing an AlGaN adjustment layer containing p-type impurity of the present invention therebetween with an appropriate Al composition, and that this further contributes to the improvement in crystallinity.

Use of an adjustment layer of the present invention makes it possible to improve flatness and crystallinity of a nitride semiconductor layer provided thereon, and this can be applied to electronic devices such as HEMTs and the like without limitation to light emitting devices. Specifically, for example when a superlattice buffer and a non-doped channel layer has an AlGaN layer containing p-type impurity, which has an approximately equal Al composition to the channel layer therebetween, the flatness and crystallinity improved in the buffer can be effectively passed on, and the flatness and crystallinity of the channel layer and layers provided thereon can be improved.

INDUSTRIAL APPLICABILITY

The present invention can provide a semiconductor device having a functional laminate excellent in flatness and crystallinity and a method of producing the semiconductor device. The flatness and crystallinity improved in a buffer can be effectively passed on to the functional laminate by providing an Al_(z)Ga_(1-z)N adjustment layer between the buffer on a substrate and a first n-type or i-type Al_(x)Ga_(1-x)N layer in the functional laminate having an n-type Al_(x)Ga_(1-x)N layer (0≦x<1). The Al_(z)Ga_(1-z)N adjustment layer (0≦z<1) is containing p-type impurity, and the Al composition z is within the range of ±0.05 from the Al composition x of the first Al_(x)Ga_(1-x)N layer.

EXPLANATION OF REFERENCE NUMERALS

-   100: Semiconductor device -   1: Substrate -   1 a: Sapphire substrate -   1 b: AlN or AlGaN layer -   2: Buffer layer -   2 a: P-type Al_(β)Ga_(1-β)N layer -   2 b: AlN layer -   3: Functional laminate -   4: N-type Al_(x)Ga_(1-x)N layer -   5: P-type impurity containing Al_(z)Ga_(1-z)N adjustment layer -   6: Light emitting layer -   7: P-type Al_(y)Ga_(1-y)N layer -   8: I-type Al_(w)Ga_(1-w)N layer not doped with impurity -   9: P-side electrode -   10: N-side electrode 

1. A semiconductor device comprising a buffer and a functional laminate including a plurality of nitride semiconductor layers, on a substrate, wherein the functional laminate includes a first n-type or i-type Al_(x)Ga_(1-x)N layer (0≦x<1) on the buffer side, and an Al_(z)Ga_(1-z)N adjustment layer containing p-type impurity, which has an approximately equal Al composition to the first Al_(x)Ga_(1-x)N layer (x−0.05≦z≦x+0.05, 0≦z<1) is provided between the buffer and the functional laminate.
 2. The semiconductor device according to claim 1, wherein the substrate is an AlN template substrate.
 3. The semiconductor device according to claim 1, wherein the buffer includes an Al_(α)Ga_(1-α)N layer (0≦α≦1) at least on the functional laminate side, and difference between an Al composition α of the Al_(α)Ga_(1-α)N layer and an Al composition x of the first Al_(x)Ga_(1-x)N layer is 0.1 or more.
 4. The semiconductor device according to claim 1, wherein the first Al_(x)Ga_(1-x)N layer is n-type, and the functional laminate includes at least a light emitting layer and a second Al_(y)Ga_(1-y)N layer (0≦y<1) in this order on the first Al_(x)Ga_(1-x)N layer.
 5. The semiconductor device according to claim 1, wherein an i-type Al_(w)Ga_(1-w)N layer (x−0.05≦w≦x+0.05, 0≦w<1) not doped with impurity is further provided between the Al_(z)Ga_(1-z)N adjustment layer containing p-type impurity and the first Al_(x)Ga_(1-x)N layer.
 6. The semiconductor device according to claim 5, wherein the Al_(z)Ga_(1-z)N adjustment layer containing p-type impurity and the i-type Al_(w)Ga_(1-w)N layer not doped with impurity satisfy the relationship of z<w.
 7. The semiconductor device according to claim 1, wherein a thickness of the Al_(z)Ga_(1-z)N adjustment layer containing p-type impurity is in a range of 100 nm to 1500 nm.
 8. The semiconductor device according to claim 1, wherein the Al_(z)Ga_(1-z)N adjustment layer containing p-type impurity is doped with Mg, and the Mg concentration is in a range of 5×10¹⁶/cm³ to 2×10²⁰/cm³.
 9. The semiconductor device according to claim 1, wherein a concentration of O contained in the first Al_(x)Ga_(1-x)N layer is less than 2×10¹⁸/cm³.
 10. The semiconductor device according to claim 1, wherein the buffer includes a superlattice strain buffer layer having a superlattice structure formed by alternately stacking Al_(β)Ga_(1-β)N layers (0≦β≦0.3) and AlN layers.
 11. A method of producing a semiconductor device, wherein a buffer, an Al_(z)Ga_(1-z)N adjustment layer containing p-type impurity (x−0.05≦z≦x+0.05, 0≦z<1), and a functional laminate including an i-type or n-type Al_(x)Ga_(1-x)N layer (0≦x<1) are sequentially formed on a substrate. 